ARAVINDH SADHANANDHAM. Particle Contamination from Flexible Polymer Components in Semiconductor Equipment: Mechanisms, Materials, and Mitigation. International Journal of Intelligent Systems and Applications in Engineering, [S. l.], v. 14, n. 1s, p. 1781–1789, 2026. Disponível em: https://www.ijisae.org/index.php/IJISAE/article/view/8417. Acesso em: 2 jul. 2026.